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90 items found for: Lithography & Photoresist Description Category Manufacturer Model Part Price ASML SVG 90S iLine Manufacturer: ASML/SVG • Model: 90-S I-line Coater/Developer Track • Wafer Size: 200mm • 104” Stand-Alone Cabinet • 4 serial arms and 1 90SE serial arm • Local exhausted cabinet locations • Facilities location is through the floor • Floor is solid SS spill containment w/ overflow sensors • Control Module on CES (left or right-integrated) • MCE on CES • Rear-pull interface for Nikon B11/12 stepper • 208 volts, 3-phase, star, 60 Hz • SECS I/II interface • Coater/Developer direct floor drain (Tee in cabinet) • Full / clogged drain sensor on each coater • Full SEMI S2-93 Containment for solvent/pump drawer enclosures, bulkhead • Facility sensors for vacuum generators, DI water and Caustic exhaust • Coater - Quantity 2 • Photoresist Temperature Control • Air Temp / Humidity Control • Dispense line ID (nozzle tip = 3/16”) • 1 SS non-coated 3 gallon un-pressurized vessel with Kalrez o-rings and 4 liquid level sensors • 0.1μm solvent filter per canister • TEBR, BEBR, SVB - 25cc Millipore unfiltered pump (subject to availability) • Solvent filter between bulk fill valve and Canister • Developer - Quantity 2 • 0.1μm Develop filter • Air Temp / Humidity Controller • High flow (2 stream) nozzle on center • 1 SS Tefzel-coated 3 gallon pressurized canister with Kalrez o-rings and 4 liquid level sensors • Vacuum Bake Ovens, Stacked - Quantity 6 • Vapor Prime Ovens, Stacked - Quantity 2 • Quick disconnects HMDS canister (no exposure) • Air Venturi, 2 modules/Venturi • SS, non-coated, 2 gallon, Kalrez o-rings, 2 level sensors, DOT canisters in chemical cabinets • Chill Plates - Quantity 3 Lithography & Photoresist ASML SVG 90S iLine 38400 Axcelis/Fusion M200 PCU Photoresist Cure Lithography & Photoresist Axcelis/Fusion M200 PCU Axcelis/Fusion M200 PCU Photoresist Cure Lithography & Photoresist Axcelis/Fusion M200 PCU Axcelis/Fusion M200 PCU Photoresist Cure Lithography & Photoresist Axcelis/Fusion M200 PCU Axcelis/Fusion PS3 Exposure Systems Lithography & Photoresist Axcelis/Fusion PS3 CANON FPA 3000 FPA 3000 iW Wide Field i-Line Stepper 8"" Lithography & Photoresist CANON FPA 3000 Inquire Canon PLA-501FA Aligner(PLA-501FA) wafer size aligner Lithography & Photoresist Canon PLA-501FA Inquire Canon FPA 3000 iW i-Line Wide Field Stepper 200mm Lithography & Photoresist Canon FPA 3000 iW Inquire CANON FPA1550M3W STEPPER Main Body/Filter Unit (G-line) Lithography & Photoresist CANON FPA1550M3W Make Offer Canon g-line / i-line / DUV Step / scanner Canon g-line, i-line, DUV Step/Scanner Spare Parts, Full Refurbishment, Modification, Upgrade, Start-up/Installation and Warranty Service My contact email： chris.wang@justinbdnl.com Lithography & Photoresist Canon g-line / i-line / DUV Step / scanner Inquire Canon MPA-600FA (2) systems available As-is System is complete and in good condition. Lithography & Photoresist Canon MPA-600FA 125,000.00 WANTED: Cymer ELS-5400 ELS-4000 Looking for reliable, working Cymer excimer laser as used in Nikon steppers, 248 or 193 nm. Lithography & Photoresist Cymer ELS-5400 ELS-4000 DNS DNS SK-200W DNS SK-200W wafer size Track Lithography & Photoresist DNS DNS SK-200W Inquire DNS 60A Developer Lithography & Photoresist DNS 60A Inquire DNS 60A Coater Lithography & Photoresist DNS 60A Inquire DNS SK-200-W Wafer track system with Two coat, Two Develop stations Lithography & Photoresist DNS SK-200-W Inquire DNS SSW_629B Scrubber Lithography & Photoresist DNS SSW_629B Make Offer DNS SSW-629B TRACK Scrubber Lithography & Photoresist DNS SSW-629B Make Offer DNS SKW-629-CV COAT Lithography & Photoresist DNS SKW-629-CV Make Offer DNS SCW-629-BV COAT Lithography & Photoresist DNS SCW-629-BV Make Offer DNS 636,629,60A,60B.... DNS 636, 629, 60A, 60B, 80A, 80B Photo Resist Coat and Develop System Spare Parts, Full Refurbishment, Modification, Upgrade, Start-up/Installation and Warranty Service My contact email: chris.wang@justinbdnl.com Lithography & Photoresist DNS 636,629,60A,60B.... Inquire DNS 636,629,60A,60B.... DNS 636, 629, 60A, 60B, 80A, 80B Photo Resist Coat and Develop System Spare Parts, Full Refurbishment, Modification, Upgrade, Start-up/Installation and Warranty Service My contact email: chris.wang@justinbdnl.com Lithography & Photoresist DNS 636,629,60A,60B.... Inquire DNS SS-W80A-AR DNS SS-W80A-AR, SS-W80B-AR Wafer Spin Scrubbing System Spare Parts, Full Refurbishment, Modification, Upgrade, Start-up/Installation and Warranty Service My contact email: chris.wang@justinbdnl.com Lithography & Photoresist DNS SS-W80A-AR Inquire Fusion 200 PCU 200 PCU wafer size UV Bake Lithography & Photoresist Fusion 200 PCU Inquire Fusion 200 PCU 200 PCU wafer size UV Bake Lithography & Photoresist Fusion 200 PCU Inquire Page 1 of 4 Previous 1 | 2 | 3 | 4 Next Go To Page: Copyright 2008 wSemi.com - All Rights Reserved.